Gas purging

For industrial and semiconductor applications

Gas purging is a critical process across numerous industries, being required to ensure contamination-free environments and improve product quality, while maintaining operational efficiency. Sensirion’s mass flow controllers (MFCs), including the SFC5500 and the new, cost-effective SFC6000D, offer superior accuracy, fast response times, and flexible configurations - making them an ideal choice for a wide range of industrial applications. 

 

Industrial applications for Sensirion MFCs 

 

Sensirion MFCs are well-suited for various industrial applications that require precise control of inert gas flow. Some examples include: 

 

  • Welding and soldering: Providing controlled gas flow to prevent oxidation and ensure high-quality joins in industrial welding processes
  • Laser cutting and additive manufacturing: Maintaining precise inert gas flow to protect materials from oxidation and ensure clean cuts or smooth layer deposition
  • Gas chromatography: Regulating carrier gas flow with high accuracy for analytical instruments
  • Food and beverage packaging: Controlling nitrogen flow for modified atmosphere packaging (MAP) to extend product shelf life

The role of gas purging in semiconductor manufacturing

Gas purging is the process of displacing unwanted gases or contaminants with an inert gas, typically nitrogen (N₂), to provide ultra-clean environments essential for semiconductor fabrication. Some key applications include:

Wafer storage purging

Ensuring that wafers remain uncontaminated by maintaining a controlled nitrogen environment in FOUPs (Front Opening Unified Pods) and storage chambers.

Atomic layer deposition (ALD)

Precisely controlling gas flows during deposition cycles to create uniform and defect-free thin films notably also used in battery manufacturing, where it plays a role in improving the performance and longevity of battery components.

Process chamber cleaning

Purging residual reactive gases from etching and deposition chambers to prevent cross-contamination and extend equipment longevity.

Why Sensirion should be part of your solution

Sensirion’s digital mass flow controllers offer high accuracy, fast response times, and multi-gas calibration, making them an optimal choice for semiconductor and industrial gas purging applications. Here’s why:

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Precision and stability

Sensirion’s SFC6000D and SFC5500 MFCs utilize CMOSens® technology, integrating sensing, signal processing, and control electronics on a single chip. This results in ultra-fast response times and high accuracy, ensuring that the correct amount of gas is delivered for purging applications without waste or fluctuations.

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Sensirion’s SFC6000D and SFC5500 MFCs utilize CMOSens® technology, integrating sensing, signal processing, and control electronics on a single chip. This results in ultra-fast response times and high accuracy, ensuring that the correct amount of gas is delivered for purging applications without waste or fluctuations.

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Unlike traditional analog MFCs, Sensirion’s digital controllers support multi-gas calibration, allowing users to switch between different gases without requiring recalibration. This flexibility is crucial for semiconductor and industrial applications where different inert gases (e.g., N₂, Ar, H₂) are used in various stages of the manufacturing process.

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Sensirion’s SFC6000D and SFM6000D offer adaptable configurations: when equipped with a valve, they function as MFCs; without a valve, they serve as flow meters. This versatility provides cost-effective solutions for applications like N₂ purging for FOUPs and wafer storage, where high precision is not as demanding, but efficiency and affordability are key.

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Sensirion’s MEMS-based sensors offer the fastest time response in the market, making them ideal for applications requiring rapid and precise gas control, such as ALD. This ensures uniform layer deposition and improved process reliability.

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Space is often a constraint in semiconductor manufacturing equipment. The SFC6000D, for example, offers high flow control performance in a compact footprint, making it ideal for integration into process tools and wafer storage systems.

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Sensirion MFCs are equipped with industry-standard communication interfaces - the RS485 and Modbus RTU (for our OEM versions) - allowing seamless integration with semiconductor manufacturing equipment and process control systems.

Enhancing efficiency and reducing costs 

 

The precision and repeatability of Sensirion’s MFCs help manufacturers reduce gas consumption, minimize downtime, increase throughput, and enhance process stability. In gas purging applications, maintaining a consistent flow rate ensures that nitrogen and other purge gases are used efficiently, cutting operational costs while maintaining the required purity levels. 

 

Gas purging is an essential process in semiconductor and industrial applications, and achieving optimal efficiency and precision requires advanced flow control technology. Sensirion’s SFC6000D and SFC5500 mass flow controllers provide exceptional accuracy, fast response times, and digital multi-gas capabilities, making them the ideal choice for gas purging applications.

For engineers and sales representatives looking to recommend a high-performance MFC solution for semiconductor and industrial customers, Sensirion’s digital MFCs stand out as a cost-effective, reliable, and cutting-edge option. Learn more about these industry-leading solutions by visiting Mouser’s Sensirion product page. Additionally, Sensirion offers OEM versions of its MFCs, which are not available through distribution. For inquiries regarding the OEM series, please contact Sensirion directly. 

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Want more detailed information?

Download our onepager on gas purging for free.

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Further applications

Photoresist dosing: Precise dosing when applying photoresist

Surface coating: Fast control speed for wide dynamic range

Front opening unified pods (FOUP)