Photoresist dosing
Precise dosing when applying photoresist
How our sensors make a difference
Precise dosing
Sensirion liquid flow sensors can measure tiny currents of photoresists. This enables precise dosing of photoresist material in the manufacture of semiconductors.
Continuous monitoring
Real-time measurement enables continuous monitoring of the manufacturing process. Changes in the quality of the process are reliably detected and manufacturing errors can be prevented by early intervention.
Made for Semicon
The sensors are suitable for semiconductor applications and meet all requirements for compatibility, quality and reliability.
Why Sensirion should be part of your solution
Used in leading facilities
Leading semiconductor companies worldwide rely on our liquid flow sensors for photoresist dosing and monitoring in their spin coating facilities.
Discover related sensors
Want more detailed information?
Download our onepager on thin film deposition – stable and precise control of gases during deposition processes – for free.
Want more detailed information?
Download our onepager on thin film deposition – stable and precise control of gases during deposition processes – for free.
Thin film deposition onepager
