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  • All products
  • Mass flow controllers
  • SFC5300

SFC5330

Small MFC for cost-sensitive OEM projects with high unit quantities

The SFC5330 mass flow controller measures and monitors mass flows with outstanding accuracy, long-term stability and repeatability. It features an impressively compact size and a broad dynamic measurement range. The SFC5330’s housing is made of metal. The SFC5330 mass flow controller is available with downmount connections and two digital interfaces. The SFC5330 is the smaller variant of the SFC5300 mass flow controller, and is suitable for cost-sensitive OEM projects with high unit quantities. As with all Sensirion sensors, the SFC5330 mass flow meter’s outstanding performance is based on our innovative CMOSens® Technology, which integrates high-precision sensor technology and processing electronics onto a single CMOS silicon chip. Combined with high-quality materials, the result is the reliably stable, extremely fast and highly precise SFC5330 mass flow controller. The SFC5330 mass flow controller is also available in a valve-free version. The two sensor products have the same performance characteristics, and are used in similar applications, meaning they make for a perfect combination. For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.
Contact sales

Specification

Mass flow
Full scale flow rate
1, 2 and 5
1, 2 and 5slm
Full scale flow rate
50, 100, 200 and 500
50, 100, 200 and 500sccm
Accuracy
0.2%FS or 2% SP
0.2%FS or 2% SP
Maximum operating pressure
10
10bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flow
Fluidic connector ports
Downmount
Downmount
Generic
Supply voltage
14 - 26.4
14 - 26.4V
Average supply current
50000
50000uA
Max. supply current
320000
320000uA
Interfaces
RS485
RS485
Size (LxWxH)
34 x 25 x 62.2
34 x 25 x 62.2mm

Downloads

Mass flow controllers brochure

05/2024

File

540.8 KB

Flyer05/2024PDF540.8 KB
Mass flow controllers brochure Chinese

06/2024

File

633.9 KB

Flyer06/2024PDF633.9 KB
Mass flow controllers brochure Japanese

06/2024

File

1.1 MB

Flyer06/2024PDF1.1 MB
Datasheet SFC5300/SFM5300 & SFC5330/SFM5330

05/2023

File

895.6 KB

Datasheet05/2023PDF895.6 KB
Engineering guide SFC5xxx/SFM5xxx

07/2023

File

869.9 KB

Application note07/2023PDF869.9 KB
Mean time between failures analysis

08/2022

File

202.9 KB

Application note08/2022PDF202.9 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note09/2021PDF293.7 KB
Selection guide mass flow controllers

11/2023

File

347.8 KB

Application note11/2023PDF347.8 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx

File

665.2 KB

Application notePDF665.2 KB
Quick start guide SFC5xxx/SFM5xxx

09/2021

File

369.3 KB

Guide09/2021PDF369.3 KB
Recalibration tool SFC5xxx/SFM5xxx

07/2022

File

1002.3 KB

Guide07/2022PDF1002.3 KB
Software manual SFC5xxx/SFM5xxx

File

1.3 MB

GuidePDF1.3 MB
Python driver SFC5xxx/SFM5xxx

Link

SoftwareLink
Recalibration tool software SFC5xxx/SFM5xxx

06/2022

File

Software06/2022File
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

03/2022

File

1.7 MB

Software03/2022ZIP1.7 MB
Software SFC5xxx/SFM5xxx

04/2022

File

1.1 MB

Software04/2022ZIP1.1 MB
Mounting plate SFX53xx

07/2022

File

196.0 KB

Drawings/CAD07/2022STEP196.0 KB
STEP file SFC5300

File

4.7 MB

Drawings/CADZIP4.7 MB
REACH and RoHS declaration SFC

01/2025

File

100.3 KB

Certificate01/2025PDF100.3 KB

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ...EK-F5xMass flow controllers

EK-F5x

Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and SFM6xxx

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

How to get started

Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.

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