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  • All products
  • Mass flow controllers
  • SFC5400

SFC5400

Versatile mass flow controller

The SFC5400 mass flow controller measures and controls mass flows with outstanding accuracy, long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFC5400 highly configurable and its body housing is made of metal. Furthermore, the flow controller is available with various interfaces and a variety of fluidic connections and measures maximum flow rates from 50 sccm up to 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow controller can check whether the activated gas calibration matches the actual gas present. The versatility of the SFC5400 makes it the ideal solution for industrial and medical applications. The SFC5400 mass flow controller is, as all sensor products, based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip and guarantees an outstanding performance. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow controller. The SFC5400 mass flow controller is available as valve-free version too. The SFM5400 mass flow meter has the same performance characteristics as the mass flow controller and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFM5400 website. For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements.
Contact sales

Specification

Mass flow
Full scale flow rate
1, 2, 5, 10, 20, 50 and 100
1, 2, 5, 10, 20, 50 and 100slm
Full scale flow rate
50, 100, 200 and 500
50, 100, 200 and 500sccm
Accuracy
0.08% FS or 0.8% SP
0.08% FS or 0.8% SP
Maximum operating pressure
5
5bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8
Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8flow
Fluidic connector ports
Swagelock, VCO, VCR, Downmount
Swagelock, VCO, VCR, Downmount
Generic
Supply voltage
14 - 26.4
14 - 26.4V
Average supply current
50000
50000uA
Max. supply current
320000
320000uA
Interfaces
Analog voltage, Analog current, Device net, IO link, RS485
Analog voltage, Analog current, Device net, IO link, RS485
Size (LxWxH)
101.1 x 24.4 x 91
101.1 x 24.4 x 91mm

Downloads

Datasheet SFC5400/SFM5400

05/2023

File

798.8 KB

Datasheet05/2023PDF798.8 KB
SFC5xxx DeviceNet communication interface reference

03/2023

File

796.4 KB

Guide03/2023PDF796.4 KB
STEP file SFC5400

File

3.2 MB

Drawings/CADZIP3.2 MB
Mass flow controllers brochure

05/2024

File

540.8 KB

Flyer05/2024PDF540.8 KB
Mass flow controllers brochure Chinese

06/2024

File

633.9 KB

Flyer06/2024PDF633.9 KB
Mass flow controllers brochure Japanese

06/2024

File

1.1 MB

Flyer06/2024PDF1.1 MB
Engineering guide SFC5xxx/SFM5xxx

07/2023

File

869.9 KB

Application note07/2023PDF869.9 KB
Mean time between failures analysis

08/2022

File

202.9 KB

Application note08/2022PDF202.9 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note09/2021PDF293.7 KB
Selection guide mass flow controllers

11/2023

File

347.8 KB

Application note11/2023PDF347.8 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx

File

665.2 KB

Application notePDF665.2 KB
Quick start guide SFC5xxx/SFM5xxx

09/2021

File

369.3 KB

Guide09/2021PDF369.3 KB
Recalibration tool SFC5xxx/SFM5xxx

07/2022

File

1002.3 KB

Guide07/2022PDF1002.3 KB
Software manual SFC5xxx/SFM5xxx

File

1.3 MB

GuidePDF1.3 MB
Python driver SFC5xxx/SFM5xxx

Link

SoftwareLink
Recalibration tool software SFC5xxx/SFM5xxx

06/2022

File

Software06/2022File
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

03/2022

File

1.7 MB

Software03/2022ZIP1.7 MB
Software SFC5xxx/SFM5xxx

04/2022

File

1.1 MB

Software04/2022ZIP1.1 MB
Mounting Plate SFX54xx

07/2022

File

168.2 KB

Drawings/CAD07/2022STEP168.2 KB
REACH and RoHS declaration SFC

01/2025

File

100.3 KB

Certificate01/2025PDF100.3 KB

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ...EK-F5xMass flow controllers

EK-F5x

Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and SFM6xxx

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

How to get started

Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.

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