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Legal notice© Sensirion AG

SFC5500-10slm

Versatile mass flow controller, via online distribution, 10 slm

SFC5500 mass flow controller series represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow controller with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration. Thanks to the exceptionally high control range enabled by the CMOSens® MEMS flow sensor, SFC5500 series can cover multiple flow ranges of a traditional mass flow controller in a single device. Coupled with multi-gas calibration and exchangeable fittings, SFC5500 series are the first mass flow controllers on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors. Thanks to this versatility, SFC5500 series are also the first mass flow controllers available via catalogue distribution. SFC5500 series complements the SFC5xxx family of Sensirion’s best-in-class mass flow Controllers, offering the same top performance as SFC5400 and is thus suited for a broad range of applications where best accuracy, highest speed and widest dynamic range are needed. However, unlike the highly configurable SFC5400 series, SFC5500 series mass flow controllers are available in several standard pre-configured variants. For other gases, flow ranges, fittings and interfaces please check SFC5400, or Sensirion’s most cost-efficient solution for large OEM projects – SFC5300. If you are looking for a mass flow meter, SFM5500 is a valve-less sister variant of SFC5500 offering the same great performance.
See inventoryDistributor listContact sales

Specification

Mass flow
Full scale flow rate
10
10slm
Full scale flow rate
10000
10000sccm
Accuracy
0.08% FS or 0.8% SP
0.08% FS or 0.8% SP
Maximum operating pressure
5
5bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2Oflow
Fluidic connector ports
Legris
Legris
Generic
Supply voltage
14 - 26.4
14 - 26.4V
Average supply current
200000
200000uA
Max. supply current
320000
320000uA
Interfaces
Device net, RS485
Device net, RS485
Size (LxWxH)
115 x 24.6 x 91
115 x 24.6 x 91mm

Downloads

Datasheet SFC5500/SFM5500

02/2024

File

975.3 KB

Datasheet02/2024PDF975.3 KB
Compatible fittings SFC5500/SFM5500

10/2022

File

193.4 KB

Application note10/2022PDF193.4 KB
STEP file SFC5500-50sccm/0.5slm/2slm/10slm

04/2022

File

3.4 MB

Drawings/CAD04/2022STEP3.4 MB
Mass flow controllers brochure

05/2024

File

540.8 KB

Flyer05/2024PDF540.8 KB
Mass flow controllers brochure Chinese

06/2024

File

633.9 KB

Flyer06/2024PDF633.9 KB
Mass flow controllers brochure Japanese

06/2024

File

1.1 MB

Flyer06/2024PDF1.1 MB
Engineering guide SFC5xxx/SFM5xxx

07/2023

File

869.9 KB

Application note07/2023PDF869.9 KB
Mean time between failures analysis

08/2022

File

202.9 KB

Application note08/2022PDF202.9 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note09/2021PDF293.7 KB
Selection guide mass flow controllers

11/2023

File

347.8 KB

Application note11/2023PDF347.8 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx

File

665.2 KB

Application notePDF665.2 KB
Quick start guide SFC5xxx/SFM5xxx

09/2021

File

369.3 KB

Guide09/2021PDF369.3 KB
Recalibration tool SFC5xxx/SFM5xxx

07/2022

File

1002.3 KB

Guide07/2022PDF1002.3 KB
SFC5xxx DeviceNet communication interface reference

03/2023

File

796.4 KB

Guide03/2023PDF796.4 KB
Software manual SFC5xxx/SFM5xxx

File

1.3 MB

GuidePDF1.3 MB
Python driver SFC5xxx/SFM5xxx

Link

SoftwareLink
Recalibration tool software SFC5xxx/SFM5xxx

06/2022

File

Software06/2022File
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

03/2022

File

1.7 MB

Software03/2022ZIP1.7 MB
Software SFC5xxx/SFM5xxx

04/2022

File

1.1 MB

Software04/2022ZIP1.1 MB
REACH and RoHS declaration SFC

01/2025

File

100.3 KB

Certificate01/2025PDF100.3 KB
  • All products
  • Mass flow controllers
  • SFC5500

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ...EK-F5xMass flow controllers

EK-F5x

Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and SFM6xxx

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

How to get started

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Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.

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