SFM6000-OEM
Best price-performance ratio, customizable version
SFC6000 is very small and light and therefore allows the customer to optimize their devices in terms of size and weight. This is a decisive advantage, especially for portable devices. Furthermore, it offers great performance in terms of repeatability, accuracy, control range and speed. The SFC600 is highly integrated and has a very robust supply chain due to the very low number of electronic components used. Based on the thermal-mass measurement principle and using our proven CMOSens® MEMS technology, Sensirion builds radical mass flow controllers with best-in-class performance and speed, which, unlike most other devices on the market, do not drift and do not require in-service re-calibration. If you are looking for a mass flow meter, the SFM6000 is a valve-less sister variant of the SFC6000, offering the same performance at an even lower price. Applications:
- Semiconductor: front opening unified pods (FOUP), glass coating and treatment
- Analytical instruments: gas chromatography, bioreactors
- Medical equipment: anesthesia, ventilation, heart-lung machines, N2O therapy
- Industrial automation
Specification
| Mass flow | |||
|---|---|---|---|
| Full scale flow rate 2, 5, 20 and 50 | 2, 5, 20 and 50 | slm | |
| Full scale flow rate 500 | 500 | sccm | |
| Accuracy 0.2% FS or 2% SP | 0.2% FS or 2% SP | ||
| Maximum operating pressure 10 | 10 | bar | |
| Calibration Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses | Air, N₂, O₂, N₂O, Ar, CO₂ and other non-aggressive gasses | flow | |
| Fluidic connector ports Push-in 6mm, downmount | Push-in 6mm, downmount |
| Generic | |||
|---|---|---|---|
| Supply voltage 22.8 - 25.2 | 22.8 - 25.2 | V | |
| Average supply current 10 | 10 | mA | |
| Max. supply current 20 | 20 | mA | |
| Interfaces Analog voltage, I²C, RS485 | Analog voltage, I²C, RS485 | ||
| Size (LxWxH) 74 x 21 x 20 | 74 x 21 x 20 | mm |
Downloads
Sensor evaluation
Buy the following products to evaluate this sensor
| Name | Description | Series | Category |
|---|---|---|---|
 EK-F5x | Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ... | EK-F5x | Mass flow controllers |
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Smart sensors for your application
Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.
