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SFM5500-10slm

High-pressure mass flow meter for multiple gases, 10 slm

SFM5500 mass flow meter series represent the culmination of Sensirion’s excellent 20-year track record in measuring gas flow. The device is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow meter with best-in-class performance and excellent reliability, which unlike most other devices on the market, does not drift and does not require in-service re-calibration. Thanks to the exceptionally high measurement range enabled by the CMOSens® MEMS flow sensor, SFM5500 series can cover multiple flow ranges of a traditional mass flow meter in a single device. They are available in metal packaging, which additionally allows for high pressure resistance. Finally, unlike most devices on the market, SFM5500 are suitable for low and ultra-low (down to 50 sccm full scale flow), as well as high gas flows. Coupled with multi-gas calibration and exchangeable fittings, SFM5500 series are the first of a kind mass flow meters on the market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors. Thanks to this versatility, SFM5500 series are also the first mass flow meters in its category available via catalogue distribution. SFM5500 series complements the SFM5xxx family of Sensirion’s best-in-class mass flow meters, offering the same top performance as SFM5400 and is thus suited for a broad range of applications where best accuracy, highest speed and widest dynamic range are needed. However, unlike the highly configurable SFM5400 series, SFM5500 series mass flow meters are available in several standard pre-configured variants. For other gases, flow ranges, fittings and interfaces please check SFM5400, or Sensirion’s most cost-efficient solution for large OEM projects – SFM5300. If you are looking for a mass flow controller, SFC5500 is a sister variant of SFM5500 featuring a valve. It offers the same great performance.
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Specification

Mass flow
Full scale flow rate
10
10slm
Full scale flow rate
10000
10000sccm
Accuracy
0.08% FS or 0.8% SP
0.08% FS or 0.8% SP
Maximum operating pressure
10
10bar
Calibration
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2O
Air, O2, N2, Ar, CO2, He, H2, CH4 and N2Oflow
Fluidic connector ports
Legris
Legris
Generic
Supply voltage
14 - 26.4
14 - 26.4V
Average supply current
35000
35000uA
Max. supply current
50000
50000uA
Interfaces
Device net, RS485
Device net, RS485
Size (LxWxH)
105 x 38.5 x 90.5
105 x 38.5 x 90.5mm

Downloads

Datasheet SFC5500/SFM5500

02/2024

File

975.3 KB

Datasheet02/2024PDF975.3 KB
Compatible fittings SFC5500/SFM5500

10/2022

File

193.4 KB

Application note10/2022PDF193.4 KB
STEP file SFM5500-50sccm/0.5slm/2slm/10slm

10/2022

File

3.4 MB

Drawings/CAD10/2022STEP3.4 MB
Engineering guide SFC5xxx/SFM5xxx

07/2023

File

869.9 KB

Application note07/2023PDF869.9 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note09/2021PDF293.7 KB
Reference and flow conversions calculator

File

30.3 KB

Application noteXLSX30.3 KB
SHDLC Interface Reference SFM5xxx/SFC5xxx

File

665.2 KB

Application notePDF665.2 KB
Quick start guide SFC5xxx/SFM5xxx

09/2021

File

369.3 KB

Guide09/2021PDF369.3 KB
Recalibration tool SFC5xxx/SFM5xxx

07/2022

File

1002.3 KB

Guide07/2022PDF1002.3 KB
SFC5xxx DeviceNet communication interface reference

03/2023

File

796.4 KB

Guide03/2023PDF796.4 KB
Software manual SFC5xxx/SFM5xxx

File

1.3 MB

GuidePDF1.3 MB
Python driver SFC5xxx/SFM5xxx

Link

SoftwareLink
Recalibration tool software SFC5xxx/SFM5xxx

06/2022

File

Software06/2022File
Software library LabVIEW, C, C# SFC5xxx/SFM5xxx

03/2022

File

1.7 MB

Software03/2022ZIP1.7 MB
Software SFC5xxx/SFM5xxx

04/2022

File

1.1 MB

Software04/2022ZIP1.1 MB
REACH and RoHS declaration SFM/SGM

01/2025

File

122.8 KB

Certificate01/2025PDF122.8 KB
Gas flow sensors brochure

01/2024

File

497.6 KB

Flyer01/2024PDF497.6 KB
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