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  • All products
  • Gas flow sensors
  • SFM3xxx

SFM3000-200

NRND

Versatile low pressure drop digital flow sensor, 200 slm

SFM3000 is a digital flow meter especially suitable for high-volume applications. The design of the flow channel results in very low pressure drop through the sensor element, making it highly suitable for medical ventilation and respiration applications. The SFM3000 bidirectionally measures the flow of air and other non-aggressive gases at rates up to 200slm with excellent accuracy and extremely high speed. It outputs a 14-bit digital signal at a 2kHz update rate. The signal is internally linearized and temperature compensated. Furthermore, the SFM3000 flow meter operates from a 5 Vdc supply voltage and features a digital 2-wire interface, making it easy to connect directly to a microcontroller. The outstanding performance of the SFM3000 sensor is based on Sensirion's patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow measuring technologies. Thanks to this proven CMOSens® Technology, the flow meter is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.

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Successor product

NameDescriptionSeriesCategory
SFM3003-300-CEVersatile low pressure drop sensor, -150 slm to +300 slm, with capSFM3xxxGas flow sensors

SFM3003-300-CE

Versatile low pressure drop sensor, -150 slm to +300 slm, with cap

SFM3xxx

Gas flow sensors

Specification

Gas flow
Full scale flow rate
200 - 200
200 - 200slm
Typical accuracy
±2.5% m.v.
±2.5% m.v.
Calibration
Air and O₂
Air and O₂
Sensor output
Flow and T
Flow and T
Maximum operating pressure
1.3
1.3bar
Fluidic connector ports
Medical cone (22 mm)
Medical cone (22 mm)
Generic
Supply voltage
4.75 - 5.5
4.75 - 5.5V
Average supply current
3800
3800uA
Max. supply current
5500
5500uA
Size (LxWxH)
82 x 35 x 32
82 x 35 x 32mm

Downloads

Datasheet SFM3000

07/2016

File

541.3 KB

Datasheet07/2016PDF541.3 KB
Cleaning methods SFM3x00-AW

01/2021

File

188.0 KB

Application note01/2021PDF188.0 KB
CRC checksum

01/2020

File

174.3 KB

Application note01/2020PDF174.3 KB
SFM3x00 I²C Functional Description

05/2022

File

306.1 KB

Application note05/2022PDF306.1 KB
Sample code SFM3000

File

261.6 KB

SoftwareZIP261.6 KB
STEP file SFM3000

File

2.2 MB

Drawings/CADSTEP2.2 MB
Product flyer medical applications SFM3000

File

183.1 KB

FlyerPDF183.1 KB
Handling instructions SFM3xxx

01/2021

File

141.7 KB

Application note01/2021PDF141.7 KB
Reference and flow conversions

09/2021

File

293.7 KB

Application note09/2021PDF293.7 KB
Reference and flow conversions calculator

File

30.3 KB

Application noteXLSX30.3 KB
Selection guide gas flow sensors

06/2025

File

449.9 KB

Application note06/2025PDF449.9 KB
Engineering guide SFM

01/2021

File

592.1 KB

Guide01/2021PDF592.1 KB
SEK-ControlCenter (all devices)

Link

SoftwareLink
Calibration certification gas flow sensors

01/2023

File

169.8 KB

Certificate01/2023PDF169.8 KB
REACH and RoHS declaration SFM/SGM

01/2025

File

122.8 KB

Certificate01/2025PDF122.8 KB
Gas flow sensors brochure

01/2024

File

497.6 KB

Flyer01/2024PDF497.6 KB

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
SEK-SensorBridgeConnecting bridge with two sensor portsSEK-SensorBridge
SEK-SFM3000Gas flow sensors evaluation kit SFM3000SEK-SFMxxxxGas flow sensors

SEK-SensorBridge

Connecting bridge with two sensor ports

SEK-SensorBridge

SEK-SFM3000

Gas flow sensors evaluation kit SFM3000

SEK-SFMxxxx

Gas flow sensors

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

How to get started

Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.

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SFM3000-200

SFM3000-200

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Global Distributors

Part numberQuantityDistributor nameCountryUploaded
SFM3000-2001Farnell, An Avnet Company10 countries03.10.2025Buy

APAC (Asia)

Part numberQuantityDistributor nameCountryUploaded
SFM3000-2001element14SG03.10.2025Buy