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SFM6000D-5slm

Best price-performance ratio, distribution version, 5 slm

The SFM6000 is a valve-less sister variant of the SFC6000 mass flow controller, offering a great performance at an even lower price. The SFC6000 mass flow controller is Sensirion’s next generation mass flow controller, impressing with an unbeatable priceperformance ratio and a very attractive delivery time of eight weeks. While the industry is currently struggling with delivery times of 30 to 53 weeks, SFC6000 samples are available within two to four weeks. In addition, selected SFC6000 configurations are available in distribution, meaning you can order them for initial testing and evaluation today and have the product in your mailbox tomorrow. The SFC6000 is very small and light and therefore allows the customer to optimize their devices in terms of size and weight. This is a decisive advantage, especially for portable devices. Furthermore, it offers great performance in terms of repeatability, accuracy, control range and speed. The SFC600 is highly integrated and has a very robust supply chain due to the very low number of electronic components used. Based on the thermal-mass measurement principle and using our proven CMOSens® MEMS technology, Sensirion builds radical mass flow controllers with best-in-class performance and speed, which, unlike most other devices on the market, do not drift and do not require in-service re-calibration. Applications: -Semiconductor: front opening unified pods (FOUP), glass coating and treatment -Analytical instruments: gas chromatography, bioreactors -Medical equipment: anesthesia, ventilation, heart-lung machines, N2O therapy -Industrial automation

See inventoryContact sales

Specification

Mass flow
Full scale flow rate
5
5slm
Full scale flow rate
5000
5000sccm
Accuracy
0.2% FS or 2% SP
0.2% FS or 2% SP
Maximum operating pressure
10
10bar
Calibration
Air, N₂, O₂, N₂O, Ar and CO₂
Air, N₂, O₂, N₂O, Ar and CO₂flow
Fluidic connector ports
Push-in 6mm, downmount
Push-in 6mm, downmount
Generic
Supply voltage
22.8 - 25.2
22.8 - 25.2V
Average supply current
10
10mA
Max. supply current
20
20mA
Interfaces
I²C, RS485
I²C, RS485
Size (LxWxH)
74 x 40 x 20
74 x 40 x 20mm

Downloads

Datasheet SFC6000D/SFM6000D

05/2023

File

1.4 MB

Datasheet05/2023PDF1.4 MB
Documentation I2C Interface SFC6000D and SFM6000D

07/2023

File

820.0 KB

Application note07/2023PDF820.0 KB
Exchange fittings SFC/SFM6000

05/2023

File

449.8 KB

Application note05/2023PDF449.8 KB
SHDLC Interface Reference SFC6xxx and SFM6xxx RS485

05/2023

File

842.0 KB

Application note05/2023PDF842.0 KB
Quick start guide SFC/SFM6000 evaluation kit

01/2023

File

561.9 KB

Guide01/2023PDF561.9 KB
SFX6000 Engineering Guide

07/2023

File

2.0 MB

Guide07/2023PDF2.0 MB
STEP file SFC/SFM6000

03/2023

File

10.6 MB

Drawings/CAD03/2023ZIP10.6 MB
Calibration certification gas flow sensors

01/2023

File

169.8 KB

Certificate01/2023PDF169.8 KB
REACH and RoHS declaration SFM/SGM

01/2025

File

122.8 KB

Certificate01/2025PDF122.8 KB
Gas flow sensors brochure

01/2024

File

497.6 KB

Flyer01/2024PDF497.6 KB
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SFM6000D-5slm

SFM6000D-5SLM

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  • All products
  • Gas flow sensors
  • SFM6000-OEM

Sensor evaluation

Buy the following products to evaluate this sensor

NameDescriptionSeriesCategory
EK-F5xEvaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and ...EK-F5xMass flow controllers

EK-F5x

Evaluation kit for Evaluation kit EK-F5x for SFC5xxx, SFM5xxx, SFC6xxx and SFM6xxx

EK-F5x

Mass flow controllers

Download the respective viewer software to start measuring

Go to download center

Start testing our sensors fast and easy with the evaluation kits

How to get started

Smart sensors for your application

Sensirion's sensor solutions are used in a wide range of applications and markets. Our reliable environmental and flow sensors improve energy efficiency, increase health and ensure safety and comfort.

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Global Distributors

Part numberQuantityDistributor nameCountryUploaded
SFM6000D-5SLM25DigiKeyUS, DE, HK03.10.2025Buy
SFM6000D-5SLM2Farnell, An Avnet Company10 countries03.10.2025Buy

EMEA (Europe)

Part numberQuantityDistributor nameCountryUploaded
SFM6000D-5SLM2SOS electronic s.r.o.SK, CZ, DE, HU, PL03.10.2025Buy

APAC (Asia)

Part numberQuantityDistributor nameCountryUploaded
SFM6000D-5SLM2element14SG03.10.2025Buy

The Americas

Part numberQuantityDistributor nameCountryUploaded
SFM6000D-5SLM4Newark, An Avnet CompanyUS03.10.2025Buy